Nucleation and Growth Mechanism of Al2O3 Thin Films Formed by Atomic Layer Deposition and Sequential Vapor Infiltration

AKYILDIZ H. İ., Mousa M., Parsons G., Jur J. S.

13th MRS/ASM/AVS/AReMS Joint Symposium at NCSU, Raleigh, NC, United States Of America, 15 November 2011, (Summary Text)

• Publication Type: Conference Paper / Summary Text
• City: Raleigh, NC
• Country: United States Of America
• Bursa Uludag University Affiliated: Yes