Optical Properties of Erbium Oxide Thin Films on Si by PEALD

DEMİRTAŞ M., KOSKU PERKGÖZ N., SEVİK C., AY F.

13th Nanoscience Nanotechnology Conference, 22 - 25 October 2017, (Summary Text)

• Publication Type: Conference Paper / Summary Text
• Bursa Uludag University Affiliated: No