On the spatial resolution of uncoated optical-fiber probes in internal reflection near-field scanning optical microscopy

Atia W., Pilevear S., Gungor A., Davis C.

ULTRAMICROSCOPY, vol.71, pp.379-382, 1998 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 71
  • Publication Date: 1998
  • Doi Number: 10.1016/s0304-3991(97)00090-9
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.379-382
  • Bursa Uludag University Affiliated: No


We present conclusive experimental quantitative evidence of the resolution limit of uncoated optical fiber probes in the internal reflection mode. Additionally, we present a new technique for unambiguously determining the resolution of a near-field scanning optical microscope without topographical influences. A sample with nearly no topography but with a large dielectric step junction was created by evaporating a thin chromium layer on a silicon wafer and subsequently cleaving the wafer. The cleaved edge is then scanned over the step junction, allowing a quantitative determination of the lateral resolution without topographical influences. (C) 1998 Elsevier Science B.V. All rights reserved.