30th Annual Conference of the IEEE Photonics Society, IPC 2017, Florida, Amerika Birleşik Devletleri, 1 - 05 Ekim 2017, cilt.2017-January, ss.561-562
© 2017 IEEE.We report on record low-loss single mode a-Al2O3 planar waveguides and growth optimization of a-Er2O3 layers to control erbium-doping level of a-Al2O3 layers realized using Atomic Layer Deposition (ALD). Effect of growth cycle ratio of as grown Er2O3/Al2O3 layers on Photoluminescence (PL) is reported.