30th Annual Conference of the IEEE Photonics Society, IPC 2017, Florida, United States Of America, 1 - 05 October 2017, vol.2017-January, pp.561-562
© 2017 IEEE.We report on record low-loss single mode a-Al2O3 planar waveguides and growth optimization of a-Er2O3 layers to control erbium-doping level of a-Al2O3 layers realized using Atomic Layer Deposition (ALD). Effect of growth cycle ratio of as grown Er2O3/Al2O3 layers on Photoluminescence (PL) is reported.