Nucleation and Passivation of Al2O3 and TiO2 Thin Films Formed by Atomic Layer Deposition on Polymeric Substrates

AKYILDIZ H. İ., Sun Y., Jur J. S.

American Ceramics Society Electronic Materials and Applications Conference, 24 January 2014

  • Publication Type: Conference Paper / Summary Text
  • Bursa Uludag University Affiliated: No