Infiltration Dynamics of Reactive ALD Precursor Exposure to Polymers

AKYILDIZ H. İ., Jur J. S.

12th International Conference on Atomic Layer Deposition, Dresden, Germany, 15 June 2012

  • Publication Type: Conference Paper / Summary Text
  • City: Dresden
  • Country: Germany
  • Bursa Uludag University Affiliated: Yes