Low Loss Atomic Layer Deposited Al2O3 Waveguides for Applications in On-Chip Optical Amplifiers

Demirtas M., Odaci C., Perkgoz N. K., Sevik C., Ay F.

IEEE Journal of Selected Topics in Quantum Electronics, vol.24, no.4, 2018 (SCI-Expanded) identifier

  • Publication Type: Article / Article
  • Volume: 24 Issue: 4
  • Publication Date: 2018
  • Doi Number: 10.1109/jstqe.2018.2825880
  • Journal Name: IEEE Journal of Selected Topics in Quantum Electronics
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Keywords: dielectric waveguides, laser applications, optical amplifiers, optical device fabrication, optical losses, optical polarization, Planar waveguides
  • Bursa Uludag University Affiliated: No


© 1995-2012 IEEE.We present the growth and optimization of ultralow loss Si-based Al2O3 planar waveguides, which have a high potential to boost the performance of rare-earth ion doped waveguide devices operating at visible and C-band wavelength ranges. The planar waveguide structures are grown using thermal atomic layer deposition. Systematic characterization of the obtained thin films is performed by spectroscopic ellipsometry, X-ray diffraction, Fourier transform infrared spectroscopy, and X-ray photoelectron spectroscopy analyses, and the optimum parameters are identified. The optical loss measurements for both transverse electric (TE) and transverse magnetic polarized light at 633, 829, and 1549 nm are performed. The lowest propagation loss value of 0.04 ± 0.02 dB/cm for the Al 2O3 waveguides for TE polarization at 1549 nm is demonstrated.