In this work, the effect of substrate material on the morphological, structural, optical and electrical properties of Fe-doped ZnO magnetic nano-crystal thin films was investigated. Fe-doped ZnO is a magnetic material and shows ferromagnetism at room temperature. FeO phases were detected in x-ray diffraction patterns. The surfaces of the films are fully occupied-spherical-like nano crystalline. The Fe/Zn ratios were calculated 1.6 and 5.9%. The optical transmittance value of the film is approximately 40%. The band gap value was shifted toward to lower value and the value was found as 3.15 eV. The maximum magnetic moments were obtained at 4000 and 2500 Oe for the film deposited onto glass and Si substrates, respectively. The electrical properties were determined at the maximum magnetic moment situation for the nano crystallites. It was found that diluted Fe-doped ZnO magnetic semiconductors have giant magnetic moment and electrical conductivity.