In this study, using the ultrasonic spray pyrolysis technique, undoped and Fe-doped (at 2, 4, 6%) Co3O4 films were deposited on microscope glass substrates at 300 +/- 5 degrees C, and the effect of Fe doping on some physical properties of Co3O4 films was examined. The structural, optical, magnetic and morphological properties of all films were analyzed using X-ray diffractometer, UV-Vis spectrophotometer, vibrating sample magnetometer and atomic force microscope, respectively. Band gap values of Co3O4:Fe films were found to be between 1.98 and 2.12 eV with an additional sub-band corresponding to energies varying between 1.48 and 1.50 eV for all samples. Structural analysis showed that crystallization levels of the films were improved with the Fe doping. Also, hysteresis curves of the films showed weak ferromagnetic characteristics and the magnetic behavior of the films was found to be sensitive to doping amount of Fe. It was found that Fe doping has beneficial effect on some physical properties of Co3O4 films.